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HOME > technology >Application data |
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· PECVD (Deposition on Al Plate with Ti & Co)
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· To increase a Hydrophile property on the cooling fin of air conditioners
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1) Substrate : Al Plate(0.1T)
2) Initial Pressure : 1 x 10-3 Torr
3) Operating Pressure : 1.5 x 10-2 Torr
4) THF injection(3cc/min.) during Ti & Co deposition
5) 6ea-Vacuum system per 1 Line
- Mech. Booster + Oil Rotary Pump : 3ea-2,600㎥/hr
- Oil Rotary Pump only : 3ea-210㎥/hr
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· Long Time Maintenance(4~7 months → 1 Years)
· Save a lot of Utility cost (Oil & Etc.)
· Eliminate oil treatment Problem
· Low operation cost
· Simple & stable Vacuum System
· Maximize Product quality
· Small installation space
· Production cost reduction with above advantages
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| Before (Wet type) |
After (Dry type) |
Oil Rotary Vacuum Pump
w/ Mech. Booster |
Dry Screw Vacuum Pump
w/ Mech. Booster |
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| Description |
Application Plant |
Process |
End User |
| Cooling fin of air conditioner |
PECVD |
Co, Ti THF |
LG Electronics |
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| Before (Wet type) |
After (Dry Type) |
| Waste oil treatment problem |
Eliminate oil treatment problem |
Too much Utility Cost
(Frequent vacuum oil change) |
No oil change required |
| Short Time Overhaul(4~7 Months) |
One Year Overhaul |
Unstable Vacuum level due to oil
contamination |
Constant Vacuum level |
| High Noise level |
Contact free Dry operation
Low Noise level |
Dirty working environment
(Frequent vacuum oil change) |
Clean working environment |
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| Description |
Unit |
Before (Wet type) |
After (Dry type) |
| Type |
- |
Oil Rotary Vane |
Dry Screw |
| Operation Q'ty |
Set |
1 |
1 |
| Pumping Speed |
㎥ / Hr |
350 |
320 |
| Ultimate Pre. |
Torr |
5 x 10-4 |
1 x 10-4 |
| Motor |
kw |
8.5 |
7.5 |
| Oil |
ℓ |
28 |
1.8 |
| Oil change time |
Day |
2 |
6 month |
| Cooling Water |
ℓ / min |
2 |
8 |
| Overhaul Time |
Months |
4 ~ 7 |
12 ∼ 18 month |
| Working environment |
- |
Dirty |
Clean |
| Noise |
dB |
<80 |
<70 |
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