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| HOME > products > Dry Vacuum Pump |
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· High reliability proved in various of industry field
· Optimized screw rotor and shorter gas pass
· Water cooled type motor
- Adopted Water cooled type motor and solved the main problem of air cooled
type motor which had noise and solved the problem of flying the dust in all
directions well.
· Easy to move and work
- Easy to move and work with portable type
- Easy to operate with the separation type of control panel, easy to stick to
the controller on all positions and available to operate on the remote.
· Soundproofing panel
- Available to use indoors by reducing the noise and adopting the visual
design panel.
- Certified quality and reliability in the field of flat display and semi-conductor
· Small and economical vacuum pump
· Small Footprint and easy operation
· Improved displacement
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Available to choose the suitable pump from the range (50 ～ 5000 m3/hr)
Air cooled type pump - SE50, SE80
Simple structure and compact design of the pump
· Low unit cost
· Minimized installation
· Short gas path to discharge (High speed of discharge)
Structure of screw type rotor and one stage
· Higher volume efficiency
· Lower noise and vibration
Low operation cost - Low power consumption
· Small amount of cooling water supply
Low maintenance cost
· More simple structure than the pump with multi-stage
· Minimized repairing time and cost.
Improved pump's life and low maintenance cost
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· OLED
· LiPB
· Ultrasonic Cleaning/Plasma Cleaning
· Heat Treatment Furnace
· Electric, Electronics & all Semiconductor Process
Load-lock & transfer chamber pumping
Backing a turbo pump on all processes
CVD, PVD, Etching, Ion implantation etc.
The clean & harsh chemistries used in all semiconductor applications
Vacuum Packaging Process (PDP)
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| Guide of Pump Selection |
Neovac seires |
| Application |
Air Evacuation |
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Load lock/Transfer/Buffer
Chamber evacuation
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∨ |
| Sputtering Deposition |
∨ |
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| Ion implantation |
∨ |
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| Ashing |
∨ |
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| Etching Process |
Metal |
∨ |
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Oxide |
∨ |
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Nitride |
∨ |
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| CVD Process |
Nitride |
∨ |
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Oxide |
∨ |
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Nitride |
∨ |
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| Epitaxial Process |
∨ |
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