제품소개

  • 기술자료실
  • 고객센터
  • 회사소개
 
 
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KDP-series
kowel has been trying to develop vacuum industry since it't establishment in 1989.
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Neovac
FEATURES
· High reliability proved in various of industry field
· Optimized screw rotor and shorter gas pass
· Water cooled type motor
  - Adopted Water cooled type motor and solved the main problem of air cooled
    type motor which had noise and solved the problem of flying the dust in all
    directions well.
· Easy to move and work
  - Easy to move and work with portable type
  - Easy to operate with the separation type of control panel, easy to stick to
    the controller on all positions and available to operate on the remote.
· Soundproofing panel
  - Available to use indoors by reducing the noise and adopting the visual
    design panel.
  - Certified quality and reliability in the field of flat display and semi-conductor
· Small and economical vacuum pump
· Small Footprint and easy operation
· Improved displacement
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Available to choose the suitable pump from the range (50 ~ 5000 m3/hr)
Air cooled type pump - SE50, SE80
Simple structure and compact design of the pump
· Low unit cost
· Minimized installation
· Short gas path to discharge (High speed of discharge)
Structure of screw type rotor and one stage
· Higher volume efficiency
· Lower noise and vibration
Low operation cost - Low power consumption
· Small amount of cooling water supply
Low maintenance cost
· More simple structure than the pump with multi-stage
· Minimized repairing time and cost.
Improved pump's life and low maintenance cost
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· OLED
· LiPB
· Ultrasonic Cleaning/Plasma Cleaning
· Heat Treatment Furnace
· Electric, Electronics & all Semiconductor Process
  Load-lock & transfer chamber pumping
  Backing a turbo pump on all processes
  CVD, PVD, Etching, Ion implantation etc.
  The clean & harsh chemistries used in all semiconductor applications
  Vacuum Packaging Process (PDP)
Guide of Pump Selection Neovac seires
Application Air Evacuation  
Load lock/Transfer/Buffer
Chamber evacuation
 
Sputtering Deposition  
Ion implantation  
Ashing  
Etching Process Metal  
  Oxide  
  Nitride  
CVD Process Nitride  
  Oxide  
  Nitride  
Epitaxial Process